Professor Chee Kwok

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Chee Kwok is Professor in Microsystems and Deputy Head of School with the School of Electrical Engineering and Telecommunications. His research interests include:

Microsystems/MEMS (MicroElectroMechanical Systems)

MEMS based optical interconnects for System In a Package
MOEMS (MicroOptoElectroMechanical Systems): integrated optical cross-switches
MEMS based VLSI chip cooling-module using dual synthetic jets
Out-of-plane microactuators
Application of micromachining technology to microsensors and microactuators
Application of micromachining technology to microsensors and microactuators
Inertial and angular sensors: capacitive, optical, magnetic
Flowsensors: thermocapactive
BioMEMS: neural stimulators

Analog integrated circuit design

Low power/low voltage CMOS analog design
Analog design with floating-gate CMOS devices

Insulating thin films/non-volatile memory

Electrical properties of SiO2 films, trap generation and charge trapping studies, Fowler-Nordhiem tunnelling.
EEPROM programming studies and long term reliability.

Phone

+61 (2) 9385 5300

E-mail

cy.kwok@unsw.edu.au

Location

School of Electrical Engineering and Telecommunications (Building G17) Room 242

Books | 2011

Michael AW; Kwok CY, 2011, Novel Micro-bridge Actuator For Optical Switching Application, Original, LAP LAMBERT Academic Publishing, Germany, http://www.amazon.com/Micro-bridge-Actuator-Optical-Switching-Application/dp/3846544760
Book Chapters | 2013

Michael AW; Michael A; Kwok CY; Al Hafiz M; Xu YW, 2013, 'OPTICAL FIBER ON A SILICON CHIP', in Harun SW; Arof H (ed.), Current Development in Optical Fiber Technology, INTECH, Croatia, pp. 541 - 585, http://dx.doi.org/10.5772/54246
Journal articles | 2024

Ho YN; Michael A; Kwok CY; Pulikkaseril C, 2024, 'JMEMS Letters.1pt Parallel In-Plane Electrothermal Actuators', Journal of Microelectromechanical Systems, http://dx.doi.org/10.1109/JMEMS.2024.3381836

Journal articles | 2020

Chen SH; Michael A; Kwok CY, 2020, 'Enhancing out-of-plane stroke in piezoelectrically driven micro-lens actuator with residual stress control', Sensors and Actuators, A: Physical, 303, http://dx.doi.org/10.1016/j.sna.2019.111620

Journal articles | 2020

Rasid SMR; Michael A; Chen SH; Pota HR; Kwok CY, 2020, 'Dynamic Performance Improvement of Piezoelectrically Driven Micro-Lens Actuators', Journal of Microelectromechanical Systems, 29, pp. 1418 - 1420, http://dx.doi.org/10.1109/JMEMS.2020.3032670

Journal articles | 2020

Sengupta D; Chen SH; Michael A; Kwok CY; Lim S; Pei Y; Kottapalli AGP, 2020, 'Single and bundled carbon nanofibers as ultralightweight and flexible piezoresistive sensors', npj Flexible Electronics, 4, pp. 9, http://dx.doi.org/10.1038/s41528-020-0072-2

Journal articles | 2019

Chen SH; Michael A; Kwok CY, 2019, 'Design and Modeling of Piezoelectrically Driven Micro-Actuator with Large Out-of-Plane and Low Driving Voltage for Micro-Optics', Journal of Microelectromechanical Systems, 28, pp. 919 - 932, http://dx.doi.org/10.1109/JMEMS.2019.2935007

Journal articles | 2018

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'Aluminum Induced Crystallization of In-Situ Phosphorus Doped E-Beam Evaporated Silicon Films for High Gauge Factor Piezo-Resistors', IEEE Electron Device Letters, 39, pp. 889 - 892, http://dx.doi.org/10.1109/LED.2018.2829481

Journal articles | 2018

Wang P; Michael A; Kwok CY, 2018, 'Silicon waveguide cantilever displacement sensor for potential application for on-chip high speed AFM', Frontiers of Optoelectronics, 11, pp. 53 - 59, http://dx.doi.org/10.1007/s12200-018-0774-4

Journal articles | 2017

Chen SH; Michael A; Kwok CY, 2017, 'Enabling PZT bimorph actuator with passive polysilicon structure', Electronics Letters, 53, pp. 1373 - 1375, http://dx.doi.org/10.1049/el.2017.2714

Journal articles | 2017

Chen SH; Sengupta D; Kwok C; Ebrahimi Warkiani M, 2017, 'Characterization of single polyvinylidene fluoride (PVDF) nanofiber for flow sensing applications', AIP Advances, 7, pp. 105205, http://dx.doi.org/10.1063/1.4994968

Journal articles | 2017

Michael A; Wang P; Kwok CY, 2017, 'High aspect ratio sharp nanotip for nanocantilever integration at CMOS compatible temperature', Nanotechnology, 28, http://dx.doi.org/10.1088/1361-6528/aa7a54

Journal articles | 2017

Michael AW; Wang P; Kwok CY, 2017, 'Cantilever Inverse Taper Coupler with SiO2 Gap for Submicron Silicon Waveguides,', IEEE Photonics Technology Letters, 29, http://dx.doi.org/10.1109/LPT.2017.2723901

Journal articles | 2016

Al Hafiz MA; Michael A; Kwok CY, 2016, 'Planar microlens with front-face angle: Design, fabrication, and characterization', Journal of Micro/ Nanolithography, MEMS, and MOEMS, 15, http://dx.doi.org/10.1117/1.JMM.15.3.035501

Journal articles | 2016

Chen SH; Michael A; Kwok CY, 2016, 'E-beam Evaporated Polysilicon for Lead Zirconate Titanate-Based Micro-Actuators', IEEE Electron Device Letters, 37, pp. 1347 - 1350, http://dx.doi.org/10.1109/LED.2016.2600639

Journal articles | 2016

Michael A; Chen SS; Kwok CY, 2016, 'Feedback Driven Fast Piezoelectric Micro-lens Actuator', Procedia Engineering, 168, pp. 1492 - 1495, http://dx.doi.org/10.1016/j.proeng.2016.11.432

Journal articles | 2015

Michael A; Kwok CY; Wang P; Kazuo O; Varlamov S, 2015, 'Investigation of E-Beam Evaporated Silicon Film Properties for MEMS Applications', Journal of Microelectromechanical Systems, 24, pp. 1951 - 1959, http://dx.doi.org/10.1109/JMEMS.2015.2453191

Journal articles | 2015

Michael A; Kwok CY, 2015, 'Piezoelectric micro-lens actuator', Sensors and Actuators, A: Physical, 236, pp. 116 - 129, http://dx.doi.org/10.1016/j.sna.2015.10.035

Journal articles | 2014

Michael A; Kwok CY, 2014, 'Inter-digitated piezoelectric actuation mechanism for micro-optics application', Procedia Engineering, 87, pp. 1394 - 1397, http://dx.doi.org/10.1016/j.proeng.2014.11.703

Journal articles | 2014

Wang P; Michael A; Kwok CY, 2014, 'Fabrication of sub-micro silicon waveguide with vertical sidewall and reduced roughness for low loss applications', Procedia Engineering, 87, pp. 979 - 982, http://dx.doi.org/10.1016/j.proeng.2014.11.322

Journal articles | 2013

Michael A; Kwok CY, 2013, 'Evaporated thick polysilicon film with low stress and low thermal budget', Journal of Microelectromechanical Systems, 22, pp. 825 - 827, http://dx.doi.org/10.1109/JMEMS.2013.2248129

Journal articles | 2013

Michael AW; Peng W; Kwok CY, 2013, 'On-chip optical nano-scale displacement sensor', Micro/Nano Materials, Devices, and Systems, http://dx.doi.org/10.1117/12.2033715

Journal articles | 2012

Michael AW; Hafiz AA; Puzzer T; Kwok CY, 2012, 'Deposition and characterization of thick graded index Si xO yF z films with low stress', Sensors and Actuators A - Physical, 178, pp. 110 - 117, http://dx.doi.org/10.1016/j.sna.2012.01.036

Journal articles | 2012

Xu Y; Michael AW; Kwok CY; Puzzer T; Peng G, 2012, '1D planar silica lens integrated 3D optical interconnect system – fabrication techniques of lens integrated facingdown 45􀁱 micro-mirror', Procedia Engineering, 47, pp. 478 - 481, http://dx.doi.org/10.1016/j.proeng.2012.09.188

Journal articles | 2011

Xu Y; Michael AW; Kwok CY, 2011, 'Formation of ultra-smooth 45° micromirror on (1 0 0) silicon with low concentration TMAH and surfactant: Techniques for enlarging the truly 45° portion', Sensors and Actuators A - Physical, 166, pp. 164 - 171, http://dx.doi.org/10.1016/j.sna.2010.12.018

Journal articles | 2010

Al-Hafiz MA; Michael AW; Puzzer T; Kwok CY, 2010, 'Fabrication and Optical characterisation of planar silica lens pair', Electronics Letters, 46, pp. 1459 - 1460

Journal articles | 2009

Kwok CY; Al-Hafiz MA; Mackenzie MR, 2009, 'Design methodology of focusing elements for multilevel planar optical systems in optical interconnects', Optical Engineering, 48

Journal articles | 2009

Kwok CY; Xu Y; Michael AW; Peng G, 2009, 'A novel technique of fabricating rear 45 micromirror for stacked die optical interconnect', , 1

Journal articles | 2008

Michael AW; Kwok CY; Yu KS; Mackenzie MR, 2008, 'A novel bistable two-way actuated out-of-plane electrothermal microbridge', Journal of Microelectromechanical Systems, 17, pp. 58 - 69, http://dx.doi.org/10.1109/JMEMS.2007.911369

Journal articles | 2007

Michael AW; Kwok CY, 2007, 'Buckling shape of elastically constrained multi-layered micro-bridges', Sensors and Actuators A - Physical, 135, pp. 870 - 880, http://dx.doi.org/10.1016/j.sna.2006.10.015

Journal articles | 2007

Michael AW; Kwok CY, 2007, 'Thermo-mechanical behaviour of buckled multi-layered micro-bridges', Sensors and Actuators A - Physical, 137, pp. 157 - 168

Journal articles | 2006

Kwok CY; Wibowo E, 2006, 'Fabrication and characterization of sputtered NiTi shape memory thin films', Journal of Micromechanics and Microengineering, 16, pp. 101 - 108, http://dx.doi.org/10.1088/0960-1317/16/1/014

Journal articles | 2006

Mackenzie MR; Kwok CY; Michael AW; Yu K; Kaalund CJ, 2006, 'Etch slope compensation for planar silica waveguide lens pair', Electronics Letters, 42, pp. 2034 - 2043, http://dx.doi.org/10.1049/el:20064434

Journal articles | 2006

Michael AW; Kwok CY, 2006, 'Design criteria for bi-stable behaviour in a buckled multi-layered MEMS bridge', Journal of Micromechanics and Microengineering, 16, pp. 2034 - 2043, http://dx.doi.org/10.1088/0960-1317/16/10/016

Journal articles | 2005

Lehmann T; Kwok CY; Hasan T, 2005, 'On-chip high voltage charge pump in standard low voltage CMOS process', Electronics Letters, 41, pp. 840 - 842, http://dx.doi.org/10.1049/el:20051488

Journal articles | 2005

Yu K; Michael AW; Kwok CY, 2005, 'Two- Way bistable out-of-plane actuator using Ti/Sio2 Bilayer', Proceedings of SPIE Volume 7503, 5649, pp. 721 - 732, http://dx.doi.org/10.1117/12.582396

Journal articles | 2003

Kwok CY; Mackenzie MR, 2003, 'Theoretical Ananlysis of Integrated Collimating Waveguide Lens', Journal of Lightwave Technology, 21

Journal articles | 2003

Kwok CY; Mallinson SG; Reizes JA, 2003, 'Numerical Simulation of Micro-Fabricated Zero Mass-Flux Jet Actuators', Sensors and Actuators, 105, pp. 229 - 236

Journal articles | 2003

Suaning GJ; Lovell NH; Kwok CY, 2003, 'Fabrication of platinum spherical electrodes in an intra-ocular prosthesis using high-energy electrical discharge', Sensors and Actuators A - Physical, 108, pp. 155 - 161

Journal articles | 2001

Kwok CY; Mehrvarz HR, 2001, 'Low voltage and mismatch analysis of quadruple source coupled multi-input floating-gate mosfet multiplier with offset trimming', Analog Integrated Circuits and Signal Processing, pp. 141 - 156

Journal articles | 1999

Wong LM; Kwok CY; Rigby GA, 1999, 'A 1V CMOS D/A Converter with Multi-input Floating-gate Mosfet', IEEE Journal of Solid - State Circuits, pp. 1368 - 1390

Journal articles | 1999

Wong LSY; Kwok CY; Rigby GA, 1999, '1-V CMOS D/A converter with multi-input floating-gate MOSFET', IEEE Journal of Solid-State Circuits, 34, pp. 1386 - 1390, http://dx.doi.org/10.1109/4.792610

Journal articles | 1998

Haji-Babaei J; Kwok CY; Huang R, 1998, 'An integrable nozzle for monolithic microfuildic devices', Sensors and Actuators A - Physical, pp. 221 - 227

Journal articles | 1998

Mehrvarz HR; Kwok CY, 1998, 'A Pseudologarithmic rectifier using unbalanced bias MFMOS differential pairs', IEEE Journal of Solid - State Circuits, 33, pp. 28 - 35, http://dx.doi.org/10.1109/4.654934

Journal articles | 1997

Lin KM; Kwok CY; Huang RS, 1997, 'A strontium titanate thermocapacitive floating gate MOS flow sensor', Sensors and Materials, 9, pp. 131 - 139

Journal articles | 1996

Kwok CY; Lin K; Huang R, 1996, 'A silicon thermo-capacitive flow sensor with frequency modulated output', Sensors and Actuators A - Physical, pp. 35 - 39

Journal articles | 1996

Lin K; Kwok CY; Huang R, 1996, 'A modified MOS IC process suited for bulk micromachining', Journal of Micromechanics and Microengineering, pp. 236 - 239

Journal articles | 1996

Lin K; Kwok CY; Huang R, 1996, 'A thermo-capacitive typw MOS flow sensor', IEEE Electron Device Letters, pp. 247 - 249

Journal articles | 1996

Lin K; Kwok CY; Huang R, 1996, 'An interested thermo-capacitive type MOS flow sensor', IEEE Electron Device Letters, 17, pp. 247 - 249

Journal articles | 1996

Mehrvarz HR; Kwok CY, 1996, 'A novel multi-input floating gate MOS four-quadrant analog multiplier', IEEE Journal of Solid - State Circuits, pp. 1123 - 1131

Journal articles | 1995

Abbasapour-Sani E; Huang R; Kwok CY, 1995, 'A novel optical accelerometer', IEEE Electron Device Letters, EDL-16, pp. 166 - 168

Journal articles | 1995

Abbasapour-Sani E; Huang R; Kwok CY, 1995, 'A wide range linear optical accelerometer', Sensors and Actuators, pp. 149 - 154

Journal articles | 1995

Mehrvarz HR; Kwok CY, 1995, 'Large-input-dynamic-range multi-input floating-gate MOS four-quadrant analog multiplier', Digest of Technical Papers - IEEE International Solid-State Circuits Conference, 38, pp. 60 - 61

Journal articles | 1994

Abbaspour-Sani E; Huang RS; Kwok CY, 1994, 'A Novel Electromagnetic Accelerometer', IEEE Electron Device Letters, 15, pp. 272 - 273, http://dx.doi.org/10.1109/55.296213

Journal articles | 1994

Abbaspour-Sani E; Huang RS; Yee Kwok C, 1994, 'A linear electromagnetic accelerometer', Sensors and Actuators: A. Physical, 44, pp. 103 - 109, http://dx.doi.org/10.1016/0924-4247(94)00792-6

Journal articles | 1994

KONG SO; KWOK CY, 1994, 'FOWLER-NORDHEIM TUNNELING CURRENT IN AN MG/SIO2/SI MOS STRUCTURE', SOLID-STATE ELECTRONICS, 37, pp. 45 - 49, https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:A1994MQ09900007&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=891bb5ab6ba270e68a29b250adbe88d1

Journal articles | 1994

Kong SO; Kwok CY, 1994, 'Fowler-Nordheim tunnelling current in a yttrium/silicon dioxide/silicon MOS structure', Solid State Electronics, 37, pp. 189 - 191, http://dx.doi.org/10.1016/0038-1101(94)90126-0

Journal articles | 1994

Kwok CY; Williams A; Gross M; Gauja E; Kong SO, 1994, 'Effects of Controlled Texturization of the Crystalline Si Surface on the SiO2/Si Effective Barrier Height', IEEE Electron Device Letters, 15, pp. 513 - 515, http://dx.doi.org/10.1109/55.338421

Journal articles | 1994

Sik On Kong ; Chee Yee Kwok , 1994, 'Simulation of the program operations of the FLOTOX EEPROM', Solid State Electronics, 37, pp. 1949 - 1960, http://dx.doi.org/10.1016/0038-1101(94)90062-0

Journal articles | 1993

Kong SO; Kwok CY, 1993, 'Fowler-Nordheim tunneling current in a Mg/polycrystalline Si oxide/n ⁺ polycrystalline Si metal-oxide-silicon structure', Applied Physics Letters, 63, pp. 2667 - 2669, http://dx.doi.org/10.1063/1.110414

Journal articles | 1993

Sik On Kong ; Chee Yee Kwok , 1993, 'A study of trapezoidal programming waveform for the FLOTOX EEPROM', Solid State Electronics, 36, pp. 1093 - 1100, http://dx.doi.org/10.1016/0038-1101(93)90187-U

Journal articles | 1990

Gross M; Kong SO; Horwitz CM; Kwok CY, 1990, 'Hollow cathode deposition of silicon dioxide films', Thin Solid Films, 193-194, pp. 138 - 145, http://dx.doi.org/10.1016/S0040-6090(05)80021-5

Journal articles | 1977

Vaughan R; Kwok CY; Getreu IE, 1977, 'A Modification of the Gummel-Poon Charge-Control Equations', IEEE Transactions on Electron Devices, ED-24, pp. 1259 - 1261, http://dx.doi.org/10.1109/T-ED.1977.18990
Conference Papers | 2021

Rasid SMR; Michael A; Pota HR; Chen SH; Kwok CY, 2021, 'Modelling and Experimental Validation of Piezoelectrically Driven Micro-Lens Actuator', in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, pp. 443 - 446, http://dx.doi.org/10.1109/Transducers50396.2021.9495618

Conference Papers | 2019

Chaung I; Michael A; Kwok CY, 2019, 'Study and Application of In-Situ Phosphorus Doped Thick Polysilicon Films at Low Temperature for Post CMOS-MEMS Integration', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 299 - 302, http://dx.doi.org/10.1109/MEMSYS.2019.8870724

Conference Papers | 2019

Chen SH; Michael A; Kwok CY, 2019, 'A Novel High Performance Piezoelectrically Driven Microlens Actuator for Micro-Optics Applications', in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, pp. 1487 - 1490, http://dx.doi.org/10.1109/TRANSDUCERS.2019.8808811

Conference Papers | 2018

Chen S-H; Michael A; Kwok C, 2018, 'A Fast Response MEMS Piezoelectric Microlens Actuator with Large Stroke and Low Driving Voltage', Singapore, Singapore, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018, http://dx.doi.org/10.1109/NEMS.2018.8556979

Patents | 2018

Chen SH; Michael A; Kwok CY, 2018, Piezoelectric Microlens Actuator, Patent No. 2018900447, http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018900447

Conference Papers | 2018

Chuang I; Michael A; Soeriyadi A; Kwok CY, 2018, 'In-situ phosphorus doped ultra-high vacuum e-beam evaporated silicon for high gauge factor polysilicon', in Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Belfast, UK, pp. 1040 - 1043, presented at 2018 IEEE Micro Electro Mechanical Systems (MEMS), Belfast, UK, 21 January 2018 - 25 January 2018, http://dx.doi.org/10.1109/MEMSYS.2018.8346737

Patents | 2018

Kwok CY; Chen S-H; Michael A; Sengupta D, 2018, Advanced piezoelectric microlens actuator, Patent No. 2018903188, http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018903188

Patents | 2018

Michael A; Chen S-H; Kwok CY, 2018, Process of fabricating lead zirconate titanate (PZT) based piezoelectric devices, Patent No. , http://pericles.ipaustralia.gov.au/ols/auspat/applicationDetails.do?applicationNo=2018903179

Conference Papers | 2018

Michael A; Sengupta D; Kwok CY; Kottapalli AGP; Miao J, 2018, 'OptimizedPolyvinylideneFluorideNanoﬁberWebsforFlexible EnergyHarvesters', in EUROSENSORS 2018, MDPI, Graz, Austria, pp. 857 - 857, presented at Eurosensors, Graz, Austria, 09 September 2018 - 12 September 2018, http://dx.doi.org/10.3390/proceedings2130857

Conference Papers | 2018

Sengupta D; Prakash Kottapalli AG; Chen S-H; Michael A; Kwok C; Miao J; Triantafyllou MS, 2018, 'Flexible Graphitized Polyacrylonitrile Nanofiber Bundles for Strain Sensors', Singapore, Singapore, presented at 2018 IEEE 13th Annual International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), Singapore, Singapore, 22 April 2018 - 26 April 2018, http://dx.doi.org/10.1109/NEMS.2018.8556930

Conference Papers | 2017

Michael AW; Chen S-H; Wang P; Chuang I; Kwok CY; Liu A, 2017, 'Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure', in Fabrication of Bimorph PZT Micro-Actuators with Passive Polysilicon Structure, The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, presented at The 7th International Multidisciplinary Conference on Optofluidics 2017, Singapore, 25 July 2017 - 28 July 2017, http://dx.doi.org/10.3390/optofluidics2017-04225

Conference Papers | 2017

Michael AW; Chuang I; Kwok C, 2017, 'High Gauge Factor Piezoresistors Using Aluminium Induced Crystallisation of Silicon at Low Thermal Budget', in Proceedings, MDPI, France, Paris, pp. 354, presented at Eurosensors, France, Paris, 03 September 2017 - 06 September 2017, http://dx.doi.org/10.3390/proceedings1040354

Conference Papers | 2017

Michael AW; Wang P; Chen SH; Chuang I; Kwok CY, 2017, 'Fabrication of nano-scale high aspect ratio ultra sharp tips for nano-mechanical structures at low thermal budget', in TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems, Institute of Electrical and Electronics Engineers (IEEE), Kaohsiung, pp. 1328 - 1331, presented at Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2017 19th International Conference on, Kaohsiung, 18 June 2017 - 22 June 2017, http://dx.doi.org/10.1109/transducers.2017.7994301

Conference Papers | 2017

Sengupta D; Kottapalli AGP; Miao J; Kwok CY, 2017, 'Electrospun polyvinylidene fluoride nanofiber mats for self-powered sensors', in Proceedings of IEEE Sensors, Glasgow, UK, pp. 1 - 3, presented at 2017 IEEE SENSORS, Glasgow, UK, 29 October 2017 - 01 November 2017, http://dx.doi.org/10.1109/ICSENS.2017.8233936

Conference Papers | 2015

Chen SH; Michael A; Kwok CY; Wang P, 2015, 'Design and simulation of piezoelectric PZT micro-actuators with integrated piezoresistive displacement sensors for micro-optics applications', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202502

Conference Papers | 2015

Michael A; Kwok C; Chen S-H, 2015, 'Design, fabrication, and characterisation of interdigitated piezo-electric actuation mechanism for mixing-optics', in 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015, Institute of Electrical and Electronics Engineers (IEEE), Anchorage, pp. 2101 - 2104, presented at Solid-state sensors, actuators and Microsystems, Anchorage, 21 June 2015 - 25 June 2015, http://dx.doi.org/10.1109/transducers.2015.7181372

Conference Papers | 2015

Wang P; Michael A; Kwok CY; Chen SH, 2015, 'Misalignment tolerant efficient inverse taper coupler for silicon waveguide', in Proceedings of SPIE - The International Society for Optical Engineering, http://dx.doi.org/10.1117/12.2202494

Conference Presentations | 2014

Kwok CY, 2014, 'Studies on a compact Si-Grating/micro-mirror/silica waveguide coupler', presented at APCOT 2014, 7th Asia-pacific Conference on Transducers and Micro/nano Technologies, Daegu, South Korea, 29 June 2014 - 02 July 2014

Conference Papers | 2014

Micahel A; Al Hafiz MA; Kwok CY, 2014, 'Effect of front face angle on the performance of planar GRIN silica micro-lens', in 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT),Daegu, Korea, 29 Jun - 2 Jul 2014

Conference Presentations | 2014

Michael AW, 2014, 'Characterization of In-situ doped thick polysilicon films deposited using ultra-high vacuum E-beam evaporation at low thermal budget', presented at 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies(APCOT), Daegu, South Korea, 29 June 2014 - 02 July 2014

Conference Papers | 2013

Michael A; Kwok CY, 2013, 'LOW THERMAL BUDGET LOW STRESS THICK POLYSILICON FILMS FOR MEMS USING ULTRA-HIGH VACUUM E-BEAM EVAPORATION', Spain, presented at Transducers, Spain, 16 June 2013 - 20 June 2013, http://dx.doi.org/10.1109/Transducers.2013.6627173

Conference Papers | 2010

Kwok CY; Al-Hafiz MA; Xu Y; Michael AW, 2010, 'Issues in IC 3D Integration: Electrical, Optical, Fluidic Connectivity', in Proceedings of the Joint Workshop on Frontier Photonics and Electronics, School of Electrical & Telecommunications, UNSW, Sydney, Australia, pp. 40 - 43, presented at Proceedings of the Joint Workshop on Frontier Photonics and Electronics, Sydney, Australia, 04 March 2010 - 05 March 2010

Conference Papers | 2010

Michael AW; Lou L; Kwok CY, 2010, 'A Novel Piezoelectric Actuation Mechanism', in A Novel Piezoelectric Actuation Mechanism, Technical Digest, Perth, Australia, pp. 277 - 277, presented at 5th Asia-Pacific Confrence on Transducers and Micro-Nano Technology, Perth, Australia, 06 July 2010 - 09 July 2010

Conference Papers | 2010

Xu Y; Michael AW; Kwok CY; Peng G, 2010, 'Detail study on the rear 45° micromirror smoothness on (100) Si substrates', in Procedia Engineering, Elsevier BV, Netherlands, pp. 858 - 861, presented at 24th Eurosensors Conference, Linz, 05 September 2010 - 08 September 2010, http://dx.doi.org/10.1016/j.proeng.2010.09.244

Conference Papers | 2008

Al-Hafiz MA; Mackenzie MR; Kwok CY, 2008, 'Theoretical analysis of free-space optical coupling loss in a multilevel optical system', in SPIE Smart Materials Nano+Micro-Smart Systems, Australia, presented at Smart Structures, Devices, and Systems IV, Australia, 09 December 2008 - 12 December 2008

Conference Papers | 2008

Kwok CY; Michael AW; Xu Y, 2008, 'Techniques for improvement of 45 degrees micromirrors fabricated in silicon.', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Conference Papers | 2008

Michael AW; Kwok CY; Kaalund CJ, 2008, 'Novel out-of-plane micro-mirror actuator - art. no. 68000Q', in Tan HH; Chiao JC; Faraone L; Jagadish C; Williams J; Wilson AR (eds.), Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. Q8000 - Q8000, presented at Optical and IR Telescope Instrumentation and Detectors, Canberra, AUSTRALIA, http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000254227200014&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=891bb5ab6ba270e68a

Conference Papers | 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolithically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Conference Papers | 2008

Michael AW; Kwok CY, 2008, 'Fabrication of monolthically integrated micromirror into a micro-bridge actuator using thin silicon substrate', in 4th Asia Pacific Conference on Transducers and Micro / Nano Technologies, 4th Asia Pacific Conference, Taiwan, presented at 4th Asia Pacific Conference, Taiwan, 22 June 2008 - 25 June 2008

Conference Papers | 2008

Xu Y; Michael AW; Kwok CY, 2008, 'Investigation of Low TMAH concentration solution with NCW-601 Triton X-100 Surfactant on silicon surface.', in EUROSENSORS XXII 2008, EUROSENSORS XXII 2008, Germany, presented at EUROSENSORS XXII 2008, Germany, 07 September 2008 - 10 September 2008

Conference Papers | 2008

Xu Y; Michael AW; Kwok CY, 2008, 'Wet anisotropic etching by TMAH with NCW-1002 surfactant on crystalline silicon surface', in SPIE Smart Materials Nano+Micro-Smart Systems, Melbourne, Victoria, Australia, presented at Micro- and Nanoengineering IV and Complex Systems, Melbourne, Victoria, Australia, 10 December 2008 - 12 December 2008

Conference Papers | 2007

Kwok CY; Michael AW; Kaalund CJ, 2007, 'Novel out-of-plane micro-mirror actuator', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Conference Papers | 2007

Kwok CY; Michael AW; Xu Y, 2007, 'Fabrication of smooth 45 micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon', in SPIE 2007: Device and process technologies for microelectronics, MEMS, photonics, and nanotechnology IV, Beijing, China, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Conference Papers | 2007

Xu Y; Michael AW; Kwok CY, 2007, 'Fabrication of smooth 45 degrees micromirror using TMAH low concentration solution with NCW-601A surfactant on silicon - art. no. 68001W', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at International Conference on Legal, Security and Privacy Issues in IT Law, Beijing, China, 05 December 2007 - 07 December 2007

Conference Papers | 2006

Michael AW; Kwok CY, 2006, 'Thermo-elastic behaviour of buckled multi-layered MEMS bridge: model and experiment', in IEEE Sensors 2006, Daegu, Korea, presented at IEEE Sensors 2006, Daegu, Korea, 22 October 2006 - 23 October 2006

Conference Papers | 2005

Lehmann T; Hasan T; Kwok CY, 2005, 'A 5V Charge Pump in a standard 1.8-V 0.18-um CMOS process', in IEEE International Symposium on Circuits and Systems (ISCAS 2005), Kobe, Japan, presented at IEEE International Symposium on Circuits and Systems 2005, Kobe, Japan, 23 May 2005 - 26 May 2005

Conference Papers | 2005

Mackenzie MR; Kwok CY; Peng G, 2005, 'Integration of Microlens with Planar Lightwave Circuit', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at Photonics West 2005, San Jose, California USA, 22 January 2005 - 27 January 2005

Conference Papers | 2005

Michael AW; Kwok CY, 2005, 'Design Method for Bi-Stable Multi-Layered MEMS Bridge', in Morante JR (ed.), EUROSENSORS XIX, EUROSENSORS XIX, Barcelona, Spain, presented at EUROSENSORS XIX, Barcelona, Spain, 11 September 2005 - 14 September 2005

Conference Papers | 2005

Michael AW; Mackenzie MR; Yu KS; Kwok CY, 2005, 'Out-Of-Plane Electrothermally Actuated Bistable Buckled Microbridge Actuator', in Tang WC (ed.), 4th IEEE Conference on Sensors Proceedings, Irvine, CA, pp. 596 - 599, presented at 4th IEEE Conference on Sensors Proceedings, Irvine, CA, 31 October 2005 - 03 November 2005

Conference Papers | 2004

Kwok CY; Chaowicharat E, 2004, 'Fabrication of a nickel seismic mass microaccelerometer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Conference Papers | 2004

Kwok CY; Mackenzie MR; Peng G, 2004, 'Fabrication of integrated lens pair test device', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Conference Papers | 2004

Kwok CY; Mackenzie MR; Peng G, 2004, 'Fabrication of silica integrated planar optical waveguide lens pair', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 287 - 290, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Conference Papers | 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Bi-stability behavior of thermally actuated micro-bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Conference Papers | 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Dynamic modeling of bi-stable tri-layer micro-bridge', in Eurosensor XVIII, Eurosensor XVIII, Rome, Italy, pp. 940 - 943, presented at Eurosensor XVIII, Rome, Italy, 12 September 2004 - 15 September 2004

Conference Papers | 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bi-stable out-of-plane actuation using composite bimorph bridge', in Moriizumi T; Fujita H (ed.), Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, pp. 889 - 892, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Conference Papers | 2004

Kwok CY; Michael AW; Yu KS, 2004, 'Two-way bistable out-of-plane actuator using Ti/Sio2 bilayer', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Conference Papers | 2004

Kwok CY; Yu KS; Michael AW, 2004, 'Finite difference based dynamic modeling of MEMS bridge', in Proceedings of SPIE Volume 7503, SPIE, Washington, USA, presented at SPIE 2004: Smart Materials, Nano-and Micro-Smart Systems, Sydney, 13 December 2004 - 15 December 2004

Conference Papers | 2004

Timchenko V; Reizes JA; Mackenzie MR; Kwok CY; Leonardi E, 2004, 'MEMS actuated synthetic jets for integrated circuit cooling', in Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, presented at Asia-Pacific Conference of Transducers and Nicro-Nano Technology 2004, Sapporo, Japan, 04 July 2004 - 08 July 2004

Conference Papers | 2003

Kwok CY; Michael AW; Yu KS, 2003, 'A Novel Bistable Themmally Actuated Snap-Through Acturator for Out of Plane Deflection', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Conference Papers | 2003

Kwok CY; Michael AW; Yu KS, 2003, 'Theoretical Analysis of Initially Buckled, Thermally Actuated, and Snapping Bimorph Micro Bridge', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Conference Papers | 2003

Kwok CY; Wibowo E; Lovell NH, 2003, 'Two-way Actuation of Bi-layer Cantilever of Nickel Titanium and Silicon Nitride Thin Films by Shape Memory Effect and Stress Relaxation', in Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Conference Proceedings (Editor of) | 2003

Wibowo E; Kwok CY; Lovell NH, (eds.), 2003, 'Device and Process Technologies for MEMS, Microelectronics and Photonics III', Perth, WA, presented at Device and Process Technologies for MEMS, Microelectronics and Photonics III, Perth, WA, 10 December 2003 - 12 December 2003

Conference Papers | 2002

Kwok CY; Mackenzie MR, 2002, 'Integrated collimating waveguide lens pair', in Pacific RIM Workshop on Transducers and Micro/Nano Technologies, Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, pp. 581 - 584, presented at Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, 22 July 2002 - 24 July 2002

Conference Papers | 2002

Mackenzie MR; Kwok CY; Peng G, 2002, 'Modelling of MOEM focusing element', in 16th European Conference on Solid-State Transducers, Prague, Czech Republic, pp. 29 - 30, presented at 16th European Conference on Solid-State Transducers, Prague, Czech Republic, 15 September 2002 - 18 September 2002

Conference Papers | 2002

Suaning GJ; Lovell NH; Kwok CY, 2002, 'Fabricationof platinum spherical electrodes in an intra-ocular prosthesis using high-energy electrical discharge.', in Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, pp. 1 - 4, presented at Pacific RimWorkshop on Transducers and Micro/Nano Technologies, Xiamen China, 22 July 2002 - 24 July 2002

Patents | 2001

Mackenzie MR; Kwok CY, 2001, Integrated Optical Cross-Switch, Patent No.

Conference Papers | 2001

Mackenzie MR, 2001, 'MOEM Based optical switch collimating lens', in SPIE 2001: Design, Characterization and Packaging for MEMS and Microelectronics II, Adelaide, Sth Aust, presented at SPIE 2001: BioMEMS and Smart Nanostructures, Adelaide, Sth Aust, 17 December 2001 - 19 December 2001

Conference Papers | 2001

Rojanapornpun O; Kwok CY, 2001, 'Fabrication of Integrated Micromachined Polymer Magnet', in SPIE 2001: Device and Process Technologies for MEMS and Microelectronics II, Adelaide, Sth Aust, presented at SPIE 2001: BioMEMS and Smart Nanostructures, Adelaide, Sth Aust, 17 December 2001 - 19 December 2001

Conference Papers | 2001

Wibowo E; Kwok CY; Lovell NH, 2001, 'Two-way shape memory NiTi Sputter-deposited film fabrication', in SPIE 2001: Device and Process Technologies for MEMS and Microelectronics II, Adelaide, Sth Aust, presented at SPIE 2001: BioMEMS and Smart Nanostructures, Adelaide, Sth Aust, 17 December 2001 - 19 December 2001

Conference Papers | 2000

Chaowicharat E; Kwok CY; Rigby GA, 2000, 'Differential Opto-mechanical accelerometer¿', in International Symposium on Smart Materials and MEMS 2000, Melbourne, pp. 126 - 133, presented at International Symposium on Smart Materials and MEMS 2000, Melbourne

Conference Papers | 2000

Mallinson SG; Kwok CY; Reizes JA, 2000, 'Numerical simulation of zero mas-flux actuators', in 14th European Conference on Solid-State Transducers (XIV Eurosensors), 14th European Conference on Solid-State Transducers (XIV Eurosensors), Copenhagen, Denmark, presented at 14th European Conference on Solid-State Transducers (XIV Eurosensors), Copenhagen, Denmark

Conference Papers | 1999

Chaowicharat E; Kwok CY; Rigby GA, 1999, 'Silicon surface micromachining over active devices', in International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS 99, Royal Pines Resort, Gold Coast, Queensland, Australia, presented at International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS 99, Royal Pines Resort, Gold Coast, Queensland, Australia, 27 October 1999 - 29 October 1999

Conference Papers | 1999

Haji-Babaei J; Kwok CY, 1999, 'Characteristics of a monolithic microvalve with large displacement electrostatic actuator', in International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS 99, Royal Pines Resort, Gold Coast, Queensland, Australia, presented at International Symposium on Microelectronics and Micro-Electro-Mechanical Systems MICRO/MEMS 99, Royal Pines Resort, Gold Coast, Queensland, Australia, 27 October 1999 - 29 October 1999

Patents | 1999

Kwok CY; Mehrvarz HR, 1999, Four quadrant square law analog multiplier using floating gate MOS transistors, Patent No.

Conference Papers | 1998

Kwok CY, 1998, 'Interfacing intelligent systems to the natural world: Microsensors & Microactuators', in 2nd International Conference on Knowledge-Based Intelligent Electronics Systems, Adelaide, Sth Aust, pp. 442 - 446, presented at 2nd International Conference on Knowledge-Based Intelligent Electronics Systems, Adelaide, Sth Aust, 21 April 1998 - 23 April 1998

Conference Papers | 1997

Haji-Babaei J; Kwok CY; Huang R, 1997, 'Bucking behaviour of electrostatically actuated doubly-supported beams', in Jackowicz RS (ed.), 11th European Conference on Solid State Transducers, 11th European Conference on Solid State Transducers, Warsaw, Poland, presented at 11th European Conference on Solid State Transducers, Warsaw, Poland, 21 September 1997 - 24 September 1997

Conference Papers | 1997

Haji-Babaei J; Kwok CY; Huang R, 1997, 'Integrable Active Microvalve with surface micromachined curled-up Actuator', in Jachowicz RS (ed.), International Conference on Solid-State Sensors and Actuators 1997, Chicago Illinois USA, pp. 833 - 836, presented at International Conference on Solid-State Sensors and Actuators 1997, Chicago Illinois USA, 16 June 1997 - 19 June 1997

Conference Papers | 1997

Kwok CY; Puzzer T; Lin K; Haji-Babaei J, 1997, 'DC Magnetron sputtered molybdenum thin films for micromechanical structures', in Hariz A; Varadan VK; Reinhold O (eds.), Proceedings of SPIE Volume 7503, SPIE, Washington, USA, pp. 143 - 150, presented at Far East and Pacific Rim Symposium on Smart Materials, Structrures and MEMS, Adelaide, Australia, 10 December 1997 - 13 December 1997, http://dx.doi.org/10.1117/12.293487

Conference Papers | 1997

Wong LS; Kwok CY; Rigby GA, 1997, 'A 0.9V 5MS/s CMOS D/A Converter with Multi-Input Floating-gate MOS,', in IEEE Custom Integrated Circuits Conference, pp. 305 - 308, presented at IEEE Custom Integrated Circuits Conference

Conference Papers | 1995

Huang R; Abbasapour-Sani E; Kwok CY, 1995, 'A novel accelerometer using silicon micromachined cantilever supported optical grid and pin photodetector', in Transducer 1995, Stockholm, Sweden, pp. 663 - 666, presented at Transducer `95, Stockholm, Sweden, 25 June 1995 - 29 June 1995

Conference Papers | 1995

Kong SO; Kwok CY; Wong S, 1995, 'An EPROM cell with a magnesium electronic injector', in IEEE Region 10 International Conference Microelec. etc, Hong Kong, pp. 456 - 459, presented at IEEE Region 10 International Conference Microelec. etc, Hong Kong, 06 November 1995 - 10 November 1995

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Professor Chee Kwok