PANalytical MRD XRD
Flexible X-ray diffraction system
Description
The Panalytical Xpert Materials Research diffractometer (MRD) system is a flexible X-ray diffraction system for analysis of thin films, nano-structures, semiconductor materials, stresses and textures.
Specifications
- 3 kW Cu anode with Eulerian cradles for precise and reproducible, unobstructed movements for sample rotation, tilt and x-, y- and z.
- MRD Setting 1 - high resolution module with the X-ray mirror + Ge (220) monochromator, used for rocking curve, reciprocal space mapping.
- MRD Setting 2 (normal) - medium resolution module with the X-ray mirror and collimator, used for thin film analysis and phase identification.
- MRD Setting 3 - low resolution module with the Cu tube, X-ray lens and collimator, used for analysis of textures and stresses and phase identification.
Application
- Configurable for phase identification, stress/texture analysis, and X-ray reflectivity.
- Used for thin film and nanomaterial research; identifies 20 nm polycrystalline phases.
- Vacuum Stage for 8-inch wafer samples; max thickness: 9 mm (standard), 4 mm (vacuum).
Related instruments
Instrument location
X-ray Diffraction Laboratory
Room G65
June Griffith Building (F10)
UNSW Sydney, NSW 2033
Email: xrdlab@unsw.edu.au
Yu Wang
Senior Technical Officer
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Email
yu.wang@unsw.edu.au
Saroj Kumar Bhattacharyya
Technical Officer
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Email
saroj.bhattacharyya@unsw.edu.au
Moein Seyfouri
Research Fellow Analytical Chemistry Facility
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Email
m.seyfouri@unsw.edu.au
Parent facility
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